,

Cyclic Etching of Copper Thin Films using Two Sequential Steps

,

Etch characteristics of cooper thin film using continuous-wave and pulse-modulated plasma of CH3COOH/Ar

,

Inductively coupled plasma reactive ion etching of Cu thin film using plasma of organic compounds

,

Inductively Coupled Plasma Reactive Ion Etching of Copper Thin Films Using Carboxylic Acids

,

Influence of pulsed-modulated plasma on etch characteristics of copper thin films