,

Layer-by-layer etching of copper thin films using organic chelator/O2 gas and Ar plasma

,

80 nm-line etching of copper thin films using ethylenediamine/acetic acid/Ar gas mixture

,

Dry Etching of Co Thin Films Using High Density Plasma of Organic Gases

,

Layer-by-layer etching of copper thin films under acetylacetone/O2 gas mixture

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Layer-by-Layer Etching of Copper Thin Films Using Acetylacetone/O2/Ar Gas Mixture