,

Etch characteristics of Cu thin film using inductively coupled plasma of non-greenhouse gases

,

Investigation on aerosol jet etching for thin film patterning

,

Etch Characteristics of Nanometer-Scale Patterned Thin Film Using Aerosol Jet Etching System

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Etch Characteristics of Micrometer-Scale Masked Cu thin films Using Inductively Coupled Plasma of H2/Ar

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Inductively coupled plasma reactive ion etching of Cu thin film using O2/Ar plasma