,

Inductively Coupled Plasma Reactive Ion Etching of Cobalt Thin Films Using Halogen Gas

,

High Density Plasma Reactive Ion Etching of Cobalt Thin Films Using CH3COCH3/Ar Plasma

,

Effective wet cleaning for removal of redeposited materials on dry-etched copper thin films

,

500nm-Line Etching of Cobalt Thin Films Using Organic Gas

,

Dry etching of copper thin films using acetylacetone/O2/Ar plasma