,

Cyclic Etching of Copper Thin Films Using Organic Compound/O2/Ar Gas

,

influence of Organic Additives to Ethylenediamine on Etch Characteristics of Copper Thin Films Using High Density Plasma

,

Inductively Coupled Plasma Reactive Ion Etching of Cu thin films using Carbon-Based Plasma

,

Atomic Layer Etching of Nanometer-Scale Patterned Cu Thin Films Using Chelation with Organic Gas

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Inductively Coupled Plasma Reactive Ion Etching of Copper thin films using Organic Materials