발행물
컨퍼런스
2023 Korean Society for Surface Engineering Spring Conference
2023.05
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Low Thermal Budget HZO Thin Film by Controlling Deposition Temperature
2023 Korean Institute of Metals and Materials Spring Conference
2023.04
Ferroelectricity Enhancement and Mitigation of the Wake-Up Effect of Hf₀.₅Zr₀.₅O₂ Thin Film Deposited on Oxidized W Electrode
The Remote Scavenging Effect of Ti on Fluorite-Structured Ferroelectric Hf₀.₅Zr₀.₅O₂ Thin Film for Low Thermal Budget
2023 Korean Ceramic Society Spring Conference
The Reduction of Interfacial Layer in (Hf,Zr)O₂ Thin Film by the Scavenging Effect from the TiN/Ti/TiN Layer
Giant Ferroelectricity in Mo/Hf₀.₅Zr₀.₅O₂/TiOₓ/SiOₓ/Si Capacitor at Sub-5-nm Scale