발행물
컨퍼런스
ICAE 2021
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Atomic-layer deposition of TIO2 thin films using a (CpMe5) Ti(OMe)3 precursor with high thermal stability
The modulation of carrier density in Bi2Te3-based alloys via point-defect engineering with cation and anion mediation method
ISIMP 2021
Conformal heterogeneous coating on particles by modified DC magnetron sputtering system
IUMRS-ICA 2021
Atomic Layer Deposition of TiO2 Thin Films with a Thermally Stable (CpMe5) Ti(OMe)3 Precursor
Advanced Area-Selective Atomic Layer Deposition through the Discrete Feeding of Short-Chain Inhibitor Molecules