,

Inhibitor-Free Area-Selective Atomic Layer Deposition of SiO2 through Chemoselective Adsorption of an Aminodisilane Precursor on Oxide versus Nitride Substrates

,

Atomic Layer Deposited Li-based Memristor Devices for Neuromorphic Computing

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N controlled Lithium Phosphorous Oxy-nitride(LiPON) Electrolyte Coating by LiPON:LiN ALD cycle ratio for Enhancing Ionic Conductivity

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Area­Selective Atomic Layer Deposition of SiO2 Thin Films to Confer Oxide versus Nitride Selectivity

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Li-Nb-O Family Deposited by Atomic Layer Deposition (ALD) for Artificial Synapse