발행물
컨퍼런스
제30회 한국반도체학술대회
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Advanced Atomic Layer Deposition (ALD): Ultrathin Metal Film Growth Using Discrete Feeding Method and Electric Potential Assisted ALD
In-situ Observation of Two-Dimensional Electron Gas Creation at the Interface of an Atomic-Layer-Deposited Al2O3/TiO2 Thin Film Heterostructure
Growth Characteristics of Atomic Layer Deposited Iridium Thin Films with TICP and Oxygen
2022년도 한국표면공학회 추계학술대회
Advanced Atomic Layer Deposition: Ultrathin metal film growth using discrete feeding method and electric potential assisted-atomic layer deposition
ENGE 2022
Selective Dissolution-Derived Nanoporous Design of Bulk Bi2Te3 Alloys for High Thermoelectric Performance