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Growth and Characterization of Iridium Thin Films Grown by Atomic Layer Deposition with a TICP and Oxygen

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Li-Nb-O Protection Layer for Li-ion Battery Electrodes via Atomic-Layer-Deposition

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Hollow cathode plasma source를 이용한 저온?고품질 SiNx ALD 공정

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신규 Hf 전구체를 이용한 고온 ALD HfO2 박막의 불순물 특성 개선

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Oxidation of thermoelectric Bi2Te3-based alloys by atomic layer deposition of Ru metal