,

Atomic-layer deposition of SrTiO3 thin films on Pt electrode for memory capacitor applications

,

Two-dimensional Electron Gas for Conductive Bridge Random Access Memory

,

Substrate-dependent Selective Atomic Layer Etching of Metal Oxides

,

Improved PEALD ZrO2 Film Properties Using Hollow Cathode Plasma Source

,

Atomic layer deposition of Ru thin films using novel Ru(Ⅱ) precursor with enhanced reactivity