,

Molecular Layer Deposition of a Tin-Based Organic-Inorganic Hybrid Thin Films for Photoresist

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Enhanced Growth Behavior and Electrical Properties of Atomic-Layer-Deposited La2O3 film at High Temperature Using Novel Precursor with Discrete Feeding Method

,

Advanced Atomic Layer Deposition: Metal Oxide Thin Film Growth Using Electric Potential

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고등 원자층 증착공정 (Advanced ALD)

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Advanced atomic layer deposition