발행물
컨퍼런스
61th Gaseous Electronics Conference
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New method to measure the electron temperature in Ar/He mixture capacitive discharge
Experimetal investigation on Edge-to-Center density ratio in an inductively coupled plasma
Simple analysis method of I-V curve
한국진공학회 제3회 하계정기학술대회
자기 바이어스 현상을 이용한 전자온도 및 이온밀도 측정연구
1st International conference on microelectronics and plasma technology
Langmuir probe perturbation in inductively coupled plasmas