발행물
컨퍼런스
제34회 동계 정기학술대회
,
실시간 플라즈마 진단 기술
SEMICON KOREA 2007
New Plasma Processing Monitoring Technology
60th annual gases electronics conference
Langmuir probe perturbation in plasma distribution measurement in an inductively coupled plasma
60th annual gasesous electronics conference
The effect of a planar antenna on a ferromagnetic core ICP
Measurement of electron temperature and argon metastable density measuring optical emission in inductively coupled plasmas