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Real time feedback control of plasma density by using a floating probe in inductively coupled plasmas

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Real-time measurement of electron temperatures and ion densities using self-bias effect in argon inductively coupled plasma

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Electron series resonance in an inductive ion etching reactor

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Experimantal investigation on the Boltzmann relation for a bi-Maxwellian plasma

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Experimental Measurement of the total energy losses in a low pressure inductively coupled argon plasma