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Simple in situ method for real time mearsurment of dielectric film thickness in plasma

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Plasma diagnostics using floating harmonics method and recent results in processing plasma

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A Floating Harmonics Method for Measuring Electron Temperature In Non-Maxwellian plasmas

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Low energy electron heating and evolution of the electron energy distribution by diluted O2 in a planar inductive Ar/O2 mixture discharge

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Spectroscopic measurement of the electron temperature by using a simple collisional-radiative model in inductive Ar/O2 mixture discharge