발행물
컨퍼런스
62th Gaseous Electronics Conference
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Measurement of the total energy losses per electron-ion lost in argon,helium and oxygen inductively coupled plasmas
On the floating harmonics method in non-Maxwellian plasmas
Real time two-dimensional spatial distribution measurement method of electron temperature and plasma density
Comparison of Sheath Thickness obtained from the theories of ion correction in the floating potential
The Electron temperature measurement by using an optical emission spectroscopy in inductive Ar/O2 mixture discharge