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임베디드 2차원 평면 탐침을 이용한 플라즈마 균일도 진단

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Additional Planar Antenna Effect on the Ferromagnetic Core Incudtively Coupled Plasma.

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Effects of RF-bias power on plasma parameters in a low gas pressure inductively coupled plasma

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Investigation of electron energy distribution function in a weak magnetic field in solenoidal inductive discharge

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Experimental observation of the transition from nonlocal to local kineticsin inductively coupled plasma