,

Experimental measurement of the plasma parameters in Ar/SF6 inductively coupled plasma

,

RF-compensation method using Langmuir probe with auxiliary double probes

,

Measurement of metastable fractions and effect of stepwise ionization in inductively coupled argon plasmas by optical emission spectroscopy

,

Measurement of the electron energy distribution function and E-H mode transition in inductively coupled plasma with various gases

,

Investigation of the negative ion temperature and ion flux in low-pressure SF6 plasma using the AC-superposition method