,

Experimental results of two dimensional spatial distribution of plasma parameters in CVD processing plasma

,

Synergistic effect of dual power on plasma density by shift of power absorption region in inductively coupled plasma

,

Analysis of current harmonics and application on the floating harmonics method with multiple voltage waveforms in plasma

,

In situ feedback control of ion flux by using a floating harmonic method in processing plasmas

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Developement of an embedded two-dimensional probe for diagnostic of the spatial uniformity in plasmas