발행물
컨퍼런스
60th Annual Gasesous electronics conference
,
Developement of a novel inductive coupled plasma source
제1회 반도체 공정 진단 workshop
플라즈마 진단 및 모니터링 기술
Plused power plasma science 2007
E-H transition mechanisms in inductively coupled plasmas
Plused power plasma science
The digital matching network for a ferromagnetic inductively coupled plasma driven at 400kHz
Light sources 2007
Novel plasma diagnostic system applicable for RF light sources