발행물
컨퍼런스
IEEE plasma science
,
New probe method applicable to plasma processing
2006년 봄 학술논문발표회
RFTC의 DHT 안테나의 코팅에 따른 방전 특성 측정
6th International Conference on Reactive plasmas
Distributed Ferromagnetic ICP as an alternative plasma processing tool
58th Annual Gases Electronics Conference
Electrical and plasma parameters of distributed ICP driven by Ferromagnetic core array
Measurement of the sheath capacitance using a tunnel diode oscillator in ICP