발행물
컨퍼런스
MRS SPRING MEETING 2003
2003
,
THE IMPROVED THERMAL STABILITY OF NIKEL SILICIDE FILMS BY NICKEL AND TANTALUM ALLOY
EFFECTS OF GE ON THE ELECTRICAL PROPERTIES OF MOS CAPACITOR WITH POLY SI/HFO2 AND POLY SI0.4GE0.6/HF GATES STACK AFTER VARIOUS ANNEALING CONDITION
제 10회 한국반도체학술대회
PROPERTIES OF THE INTERFACIAL OXIDE AND HIGH-K DIELECTRICS IN THE HFO2/HF/SI STACK
THE FORMATION OF THE INTERFATION OXIDE IN SPUTTERED HFO2/SI SYSTEM
2002년도 추계학술연구발표회
2002
ULSI DEVICE에 적용을 위한 HIGH-K GATE OXIDE 박막의 연구