2002

,

HFO2/SI 시스템의 계면산화막 및 고유전박막의 특성연구

2002

,

THE DISTRIBUTION OF GE DURING OXIDATION OF EPI-SI1-XGEX

2002

,

COPARISON OF REACTIVE SPUTTERED OXIDE FILMS FROM ZR AND HF METAL TARGETS WITH POLY-SI OF POLY-SIGE G

2002

,

A STUDY OF THE MICRO STRUCTURE AND ELECTRICAL PROPERTIES OF THE REOXIDIZED HFO2 UPON ANNEALING METHODS

2002

,

PREVENTION OF DEGRADATION IN POLY SI1-XGEX/HIGH K STRUCTURE BY CONTROLLING GE CONTENT IN POLY SI1-XG FILMS