발행물
컨퍼런스
International Conference on Planarization CMP Technology
2023
,
A novel approach for PVA brush evaluation by contact area analysis during metal and oxide post-CMP cleaning
Effect of Cleaning Chemicals on Defects of PVA Brush during Post-CMP Cleaning
Effect of etchants and oxidizers on the Molybdenum surfaces during post-CMP cleaning process
Contact and non-contact PVA brush conditioning during oxide and metal post-CMP cleaning
Evaluation and effective removal of organic impurity sources during the synthesis process of roller-type PVA brushes for efficient post-CMP cleaning