발행물
컨퍼런스
International Conference on Advanced Electromaterials (ICAE) 2025
2028
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Ramp-up rate engineering to enhance ferroelectric HZO for in-memory computing
Thermal and electrical stability of metal electrodes for high-reliability space transformer substrates in wafer-level testing
International Technical Conference on Circuits/Systems, Computers, and Communications (ITC-CSCC) 2025
2010
Top electrode engineering for controlling ferroelectric properties of ALD-HZO thin films
Atomic Layer Deposition (ALD) 2025
2025
Machine learning-driven thermal budget analysis for ferroelectric Hf0.5Zr0.5O2 capacitors
Integrating machine learning into atomic layer deposition: a case study on hafnium oxide process optimization