발행물
컨퍼런스
The Korean Conference on Semiconductors (KCS) 2024
2026
,
A study on the equivalent oxide thickness of Hf1-XZrXO2 thin films for next-generation DRAM applications
International Conference on Advanced Electromaterials (ICAE) 2023
2003
A study on the ferroelectric properties of hafnia-zirconia thin films at cryogenic temperatures
The Electrochemical Society (ECS) Meeting 2023
2012
In-situ reflectance absorption infra-red spectroscopy (RAIRS) study on ALD of HfO2 on TiN and Pt electrodes
US-Korea Conference on Science, Technology, and Entrepreneurship (UKC) 2023
2005
High endurance of back-end-of-line compatible ferroelectric Hf0.5Zr0.5O2 thin films through low temperature annealing
Enhanced ferroelectric polarization of Hf0.5Zr0.5O2 thin films through fast ramp-up annealing process