발행물
컨퍼런스
IEEE Electron Devices Technology and Manufacturing (EDTM) Conference 2023
2010
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A study on the thermal budget of ferroelectric TiN/Hf0.5Zr0.5O2/TiN capacitors for next-generation memory applications
The Korean Conference on Semiconductors (KCS) 2023
2015
Analysis of ferroelectric properties of ALD-Hf0.5Zr0.5O2 thin films according to oxygen source
A study of ferroelectric properties according to ramp rate during Hf0.5Zr0.5O2 crystallization
Low-temperature ferroelectric Hf0.5Zr0.5O2 device for BEOL integration
IEEE Semiconductor Interface Specialists Conference (SISC) 2022
Half-cycle study with in-situ infrared spectroscopy of anhydrous hydrogen peroxide, ozone, and water based HfO2 atomic layer deposition for ferroelectric hafnia based device applications