발행물
컨퍼런스
The Korean Institute of Electrical and Electronic Material Engineers (KIEEME) 2023
2023
,
A study on the effect of top electrode replacement for controlling the ferroelectric properties of (Hf,Zr)O2 thin films
A study on improved ferroelectricity by (Hf,Zr)O2 crystallization using fast ramp-up rate
A study on BEOL-compatible low-temperature ferroelectric (Hf,Zr)O2 films with high endurance
A study on the ferroelectric properties of ALD-(Hf,Zr)O2 thin films annealed without capping layer depending on the oxygen source
IEEE Electron Devices Technology and Manufacturing (EDTM) Conference 2023
2010
Strategy for low temperature HZO ferroelectric capacitors for back-end of line applications