발행물
컨퍼런스
한국정밀공학회 2023년도 춘계학술대회
2023
,
LiTaO3 기판 CMP 슬러리 내 킬레이트제에 관한 연구
The 9th International Conference on Manufacturing, Machine Design and Tribology
Tribological study on photocatalysis-assisted SiC CMP
An Analytical Study on Edge chipping in LiTaO3 Wafer Grinding
Investigation of the Pressure according to the Angle of Square Material in Infeed Grinding
SEMICON KOREA SEMI Technology Symposium
Sustainable Approaches and Research Challenges to CMP (Invited)