발행물
컨퍼런스
20th international vacuum congress (ivc-20)
2016
,
Raman Characterization of P-doped Epitaxial Silicon Thin Films
The 2nd International Conference on Advances in Functional Materials
Microstructure and Strain Distribution of Stepwise and
MRS 2016 Spring Meeting
Dopant Activation of Heavily Phosphorus Doped Epitaxial Silicon
제 23회 한국반도체학술대회
Selective Epitaxial Growth of GaAs on In-situ profile formed Si(001) surface by metal-organic chemical vapor deposition
Estimation of electrically active phosphorus concentration by using the impurity distribution function of heavily phosphorus?doped silicon