발행물
컨퍼런스
2015년 춘계 학술대회
2015
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NF3/NH3 plasma 건식세정을 이용한 HfO2 Gate 특성 연구
한국반도체학술대회
Strain measurement in MOSFET structures with Si1-xCx S/D upon thermal annealing process
ENGE 2014
2014
Suppression of Void Formation by Optimizing Deposition Conditions of Carbon doped Ge2Sb3Te5 Films for Cyclic Endurance of Phase Change Memory
한국현미경학회 추계학술대회
Strain characteristics of MOSFET structures with Si1-xCx stressors using nanobeam electron diffraction
The 14th Non-volatile Memory Technology Symposium
Investigation of SiO2/Hf-aluminate blocking oxide stacks for 3D NAND flash application