발행물
컨퍼런스
제 23회 한국반도체학술대회
2016
,
Characterization of the Strain Relaxation Behavior of SiGe Epitaxial Layer by Dry Oxidation
Consideration for effective NMOS contact resistivityreduction via INDA(interface N-type dopant accumulation)using TiSi2 with titanium/selenium double layer on in-situ doped Si:P film
Effect of Selenium doping on the crystallization properties of GeSb for phase change memory applications
Epitaxial Growth of The Si1-xGex Fin Structure and Its Strain Relaxation
EUROSOI-ULIS 2016
Improvement of Silicide Resistivity for nMOSFET using In-situ Heavily Doped Si:P Epitaxial Growth