,

Atomic layer deposition of ultrathin metal film using discrete feeding method (DFM) and electric field-assisted ALD (EA-ALD)

,

Novel field-effect passivation for nanostructured black Si solar cells using interfacial sulfur incorporation

,

Ultrathin (? 5 nm) and Uniform Ru Film Growth Using ALD with Discrete Feeding Method and Electric Field-assisted ALD

,

Wafer-scale MoS2 monolayer growth on SiO2 substrate by modified atomic layer deposition technique

,

New-type field-effect transistors using two-dimensional electron gas in atomic-layer-deposited Al2O3/TiO2 ultrathin (?10 nm) film heterostructure