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원자층 증착법을 이용한 나노입자상의 다기능 박막 코팅층 증착

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Multifunctional ultrathin coating layers on micro/nanoparticles via atomic layer deposition

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Atomic-layer-deposited Li-Al-O protection layer on Li metal anode for Li-ion secondary batteries

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New-type thin film transistors using two-dimensional electron gas in atomic-layer-deposited Al2O3/TiO2 ultrathin (?10 nm) film heterostructure

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Photoelectrochemical hydrogen production using atomic-layer-deposited MoS2/black Si photocathode