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EFFICIENT PHOTOELECTROCHEMICAL H2 GENERATION USING MOLYBDENUM DISULFIDE FILM ON SI PHOTOCATHODE VIA WAFER-SCALE ATOMIC LAYER DEPOSITION

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ENHANCED PHOTOCATALYTIC ACTIVITY OF G-C3N4/TIO2 COMPOSITES WITH UNIFORM HETEROJUNCTION VIA ATOMIC LAYER DEPOSITION

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High growth rate (? 0.25 nm/cycle) of plasma-enhanced atomic-layer-deposited SiON thin film using ICP type remote plasma

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Continuous and ultrathin ALD Ru film deposition using discrete feeding method (DFM) and electric field assisted ALD (EA-ALD)

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Efficient photoelectrochemical hydrogen generation using molybdenum disulfide film on Si photocathode via wafer-scale atomic layer deposition