,

Atomic-layer-deposited LiAlO protective layer for Li metal anode in Li-ion secondary batteries

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Ultrathin ALD Ru Film Deposition using Discrete Feeding Method (DFM) and Electric Field Assisted ALD (EA-ALD)

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Novel powder coating technology using atomic layer deposition

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High-performance Transparent Hydrogen Gas Sensor using Oxide Heterostructures

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Atomic Layer Deposition: A Few Prospective Applications Aiming Mass-production after Surrent Si-based Semiconductor Process