발행물
컨퍼런스
The Korean Institute of Electrical and Electronic Material Engineers (KIEEME) 2022
2024
,
A study on ferroelectric properties of Hf0.5Zr0.5O2-based MFIS capacitors
A study on ferroelectric properties of ALD-(Hf,Zr)O2 thin films using a combinatorial approach
W electrode effect on ferroelectric properties of ALD-Hf0.5Zr0.5O2 films
The Minerals, Metals & Materials Society (TMS) 2022
2003
The scaling of low-temperature ferroelectric Hf0.5Zr0.5O2 thin films using anhydrous H2O2
The Korean Conference on Semiconductors (KCS) 2022
2026
Investigation of ferroelectric properties of Hf0.5Zr0.5O2 thin films according to annealing conditions