발행물
컨퍼런스
Workshop on Oxide Heterostructures (WOH) 2021
2021
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Low-thermal budget ferroelectric Hf0.5Zr0.5O2 thin films
The Korean Institute of Electrical and Electronic Material Engineers (KIEEME) 2021
2002
Electrode effect on ferroelectric properties of atomic layer deposited Hf0.5Zr0.5O2 films
Oxygen source effect on ferroelectric properties of atomic layer deposited Hf0.5Zr0.5O2 film
The Korean Conference on Semiconductors (KCS) 2021
2029
The effect of TiN top and bottom electrodes on the ferroelectric properties of Hf0.5Zr0.5O2 thin films
Pacific Rim Meeting (PRiME) 2020
2009
Investigation of hydrogen effect on ferroelectricity of atomic layer deposited Hf0.5Zr0.5O2 thin film