2001

,

A combinatorial approach to the ferroelectric properties in HfxZr1-xO2 deposited by atomic layer deposition

2001

,

High wet etch resistance SiO2 films deposited by plasma-enhanced atomic layer deposition using 1‚1‚1-tris(dimethylamino)disilane

2014

,

Investigation of hollow cathode plasma enhanced atomic layer deposition of silicon nitride (SiNx) thin films

2016

,

Consecutive area-selective deposition using self-assembled monolayer

2026

,

Realization of shifts in threshold voltage and subthreshold swing in atomic layer deposited zinc oxide as channel layer through in-situ half-cycle analysis