발행물
컨퍼런스
AVS International Symposium & Exhibition 2017
2002
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In-situ electrical characterization of surface functionalization and gate dielectric deposition processes on 2D transition metal dichalcogenides transistors
International Materials Research Congress (IMRC) 2017
2025
Epitaxial growth of ZnO layer on AlGaN/GaN heterostructure via atomic layer deposition
In-situ ALD diethylzinc (DEZ) surface passivation on In0.53Ga0.47As MOS devices
US-Korea Conference on Science, Technology, and Entrepreneurship (UKC) 2017
2012
Origin of the wet chemical resistance in silicon nitride films
Atomic Layer Deposition (ALD) 2017, Denver, USA
2018
A study on the oxygen source and annealing temperature effects of atomic layer deposited ferroelectric Hf0.5Zr0.5O2 thin films