발행물
컨퍼런스
International Workshop on Dielectric Thin Films for Future Electron Devices: Science and Technology (IWDTF) 2019
2020
,
Ex-situ grown low-temperature SiNx using hollow cathode plasma-enhanced atomic layer deposition with crystalline interfacial layer on AlGaN/GaN substrates
International Microprocesses and Nanotechnology Conference (MNC) 2019
2031
Ozone based high temperature atomic layer deposition of SiO2 thin films
The Minerals, Metals & Materials Society (TMS) 2019
2014
Ferroelectric properties of low temperature Hf0.5Zr0.5O2 films
Ferroelectricity in hafnium zirconate using tungsten capping layer
Realization of spatially addressable library using Raman as combinatorial approach on atomic layer deposition