발행물
컨퍼런스
The Korean Conference on Semiconductors (KCS) 2022
2026
,
Investigation of tungsten electrode effect on ferroelectricity of ALD-Hf0.5Zr0.5O2 thin films
Low temperature ferroelectric Hf0.5Zr0.5O2 thin films for future electronic device applications
International Workshop on Dielectric Thin Films for Future Electron Devices: Science and Technology (IWDTF) 2021
2016
Nano-polycrystalline Ag doped ZnO layer for steep-slope threshold switching selectors
European Material Research Society (E-MRS) 2021 fall
2023
Effect of bottom electrodes on ferroelectric properties of ALD-Hf0.5Zr0.5O2 films
Low-temperature (300°C) ferroelectric TiN/Hf0.5Zr0.5O2/TiN capacitors using high-pressure annealing