2004

,

Ferroelectric and dielectric properties of Hf0.5Zr0.5O2 films

2001

,

Scaling ferroelectric Hf0.5Zr0.5O2 for back-end of line integration

2001

,

In-situ half-cycle analysis of atomic layer deposited zinc oxide as channel layer in thin film transistor

2001

,

Wafer-scale characterization of atomic layer deposited zinc oxide thin films using a temperature gradient combinatorial approach

2001

,

Study of hollow cathode plasma enhanced atomic layer deposited silicon nitride: Relationship between film properties and wet etch rate