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전체 논문

174

21

Mathematical Modeling of Material Removal Rate in Roll-Type Linear CMP (Roll-CMP) Process: Effect of Polishing Pad
Hyunseop Lee
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2016

22

Effect of Citric Acid in Chemical Mechanical Polishing (CMP) for Lithium Tantalate (LiTaO3) Wafer
Hyunseop Lee
Advanced Materials Research, 2016

23

The effects of a spray slurry nozzle on copper CMP for reduction in slurry consumption
Dasol Lee, Hyunseop Lee, Haedo Jeong
Journal of Mechanical Science and Technology, 2015

24

Development of Green CMP by Slurry Reduction through Controlling Platen Coolant Temperature
Minjong Yuh, Soocheon Jang, Hyoungjae Kim, Hyunseop Lee, Haedo Jeong
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING-GREEN TECHNOLOGY, 2015

25

Signal Analysis of CMP Process based on AE Monitoring System
Sun-Joon Park, Hyun-Seop Lee, Haedo Jeong
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING-GREEN TECHNOLOGY, 2015

26

Experimental investigation of process parameters for roll-type linear chemical mechanical polishing (Roll-CMP) system
Hyunseop Lee, Han Wang, Jaehong Park, Haedo Jeong
Precision Engineering, 2014

27

Mathematical Model-Based Evaluation Methodology for Environmental Burden of Chemical Mechanical Planarization Process
Hyunseop Lee, David Alan Dornfeld, Haedo Jeong
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING-GREEN TECHNOLOGY, 2014

28

Preliminary Study on the Effect of Spray Slurry Nozzle in CMP for Environmental Sustainability
Hyunseop Lee, Yeongbong Park, Sangjik Lee, Haedo Jeong
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2014

29

Semi-empirical material removal rate distribution model for SiO2 chemical mechanical polishing (CMP) processes
H.S. Lee, H.D. Jeong, D.A. Dornfeld
Precision Engineering, 2013

30

Evaluation of environmental impacts during chemical mechanical polishing (CMP) for sustainable manufacturing
Hyunseop Lee, Sunjoon Park, Haedo Jeong
Journal of Mechanical Science and Technology, 2013