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전자 에너지 분포 함수 측정을 통한 RF 플라즈마 소스물리

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An electrical diagnostic method for double probe applicable to processing plasma

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High-speed plasma diagnostics based on the floating harmonic method

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Measurement of individual ion density using the floating harmonics probe in Ar-He mixed inductively coupled plasma

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Real-time measurement of dielectric thickness on a millimeter scale using triple-frequency in inductively coupled plasma