,

On the high frequency floating harmonic method in inductively coupled plasmas

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Correlation of plasma impedance and plasma parameters in inductively coupled Ar and CF4 plasma

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Experimental investigation on capacitively coupled plasma source using a passive resonant antenna

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Numerical distortion removal method of Langmuir probe I-V curve in RF plasma

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The behavior of floating potential and electronegativity during the E-H transition in an electronegative inductively coupled plasma