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전자온도 및 이온밀도의 고해상도 공간분포 측정에 관한 연구

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Ultra-Low Electron Temperature (ULET) Plasma for Damage-Free Plasma Processing

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Floating harmonic probe measurement using Indium Tin Oxide (ITO) glass for noninvasive plasma diagnostics

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Low-energy electron beam assisted etching in inductively coupled plasma

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Control of Radical Density through modulation of electron energy probability function in a Dual-Frequency (2 / 27.12 MHz) Inductively Coupled Plasma？