,

Control of spatial plasma density distribution using parallel capacitor in an inductively coupled plasma

,

Effects of substrate cooling on the ion density in oxygen inductive discharge

,

Floating harmonic probe measurement through thick dielectric material for noninvasive plasma diagnostics

,

Plasma density spatial distribution control in planar helical resonator

,

유도 결합 플라즈마에서 기판의 온도 변화에 따른 이온 밀도와 전자 온도 변화 연구