Mechanism of Solid-State Plasma-Induced Dewetting for Formation of Copper and Gold Nanoparticles

A study on the maximum power transfer condition in an inductively coupled plasma using transformer circuit model

Electron density and electron temperature measurement in a bi-Maxwellian electron distribution using a derivative method of Langmuir probes

Plasma diagnostic method using intermodulation frequencies in a Langmuir probe

Effects of capacitor termination to an antenna coil on the plasma parameters in a radio frequency inductively coupled plasma

On the plasma uniformity of multi-electrode CCPs for large-area processing

Wireless wafer-type probe system for measurement of two-dimensional plasma parameters and spatial uniformity

Discharge mode transition and hysteresis in inductively coupled plasma

Method for measurement of transferred power to plasma in inductive discharges

Mode transition of power dissipation and plasma parameters in an asymmetric capacitive discharge